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DANSK DS/EN ISO 14644-10 [ Revised ]

Cleanrooms and associated controlled environments – Part 10: Classification of surface cleanliness by chemical concentration

standard by Dansk Standard , 03/22/2013

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Full Description

ISO 14644-10:2012 defines the classification system for cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles). It is applicable to all solid surfaces in cleanrooms and associated controlled environments such as walls, ceilings, floors, working environment, tools, equipment and devices.

 

Product Details

Edition:
13
Published:
03/22/2013
Number of Pages:
42
File Size:
1 file , 4.4 MB
Product Code(s):
DS-041, DS-041
 

Document History

  1. DANSK DSF/PREN ISO 14644-10


    Cleanrooms and associated controlled environments – Part 10: Assessment of surface cleanliness for chemical contamination (ISO/FDIS 14644-10:2021)

    • Historical Version

  2. DANSK DS/EN ISO 14644-10


    Cleanrooms and associated controlled environments – Part 10: Assessment of surface cleanliness for chemical contamination (ISO 14644-10:2022)

    • Most Recent

  3. DANSK DS/EN ISO 14644-10

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    Cleanrooms and associated controlled environments – Part 10: Classification of surface cleanliness by chemical concentration

    • Historical Version