2910215

ISO 17973:2024

Surface chemical analysis - Medium-resolution Auger electron spectrometers - Calibration of energy scales for elemental analysis

standard by International Organization for Standardization , 07/01/2024

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Full Description

This document specifies a method for calibrating the kinetic energy scales of Auger electron spectrometers with an uncertainty of 3 eV, for general analytical use in identifying elements at surfaces. This document also specifies a method for establishing a calibration schedule.

It is applicable to instruments used in either direct or differential mode, where the resolution is less than or equal to 0,5 % and the modulation amplitude for the differential mode, if used, is 2 eV peak-to-peak. It is applicable to those spectrometers equipped with an inert gas ion gun or other method for sample cleaning and with an electron gun capable of operating at 4 keV or higher beam energy.
 

Product Details

Published:
07/01/2024
File Size:
1 file , 1.6 MB
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This product is unavailable in Ukraine, Russia, Belarus
 

Document History

  1. ISO 17973:2024

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    Surface chemical analysis - Medium-resolution Auger electron spectrometers - Calibration of energy scales for elemental analysis

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  2. ISO 17973:2016


    Surface chemical analysis - Medium-resolution Auger electron spectrometers - Calibration of energy scales for elemental analysis

    • Historical Version

  3. ISO 17973:2002


    Surface chemical analysis - Medium-resolution Auger electron spectrometers - Calibration of energy scales for elemental analysis

    • Historical Version