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About This Item
Full Description
1.1 This specification covers pure titanium sputtering targets used as a raw material in fabricating semiconductor electronic devices.
1.2 This standard sets purity grade levels, physical attributes, analytical methods, and packaging.
1.2.1 The grade designation is a measure of total metallic impurity content. The grade designation does not necessarily indicate suitability for a particular application because factors other than total metallic impurity may influence performance.
Document History
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ASTM F1709-97(2016)
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Standard Specification for High Purity Titanium Sputtering Targets for Electronic Thin Film Applications (Withdrawn 2023)- Most Recent
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ASTM F1709-97(2008)
Standard Specification for High Purity Titanium Sputtering Targets for Electronic Thin Film Applications- Historical Version
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ASTM F1709-97(2002)
Standard Specification for High Purity Titanium Sputtering Targets for Electronic Thin Film Applications- Historical Version
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ASTM F1709-97
Standard Specification for High Purity Titanium Sputtering Targets for Electronic Thin Film Applications- Historical Version