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Semiconductor manufacturing is one of the most waterintensive industries. In 1996, Intel Corporation, a large semiconductor manufacturer, used 13.2 mgd (50 ML/d) worldwide. Faced by rising water costs, scarcity of supplies, and heightened public awareness about industrial waste, the microelectronics industry has been investigating options for mitigating the environmental effects of its manufacturing processes. This study was undertaken to show how water reclamation using existing technologies can be effectively used. Water reclamation reduces the amount of water needed by reusing and recycling wastewater from manufacturing processes. A generic design for a water reclamation plan was developed for a large-scale microelectronic production facility in central Arizona. The design included system descriptions, diagrams, and flow analyses and can be modified to address regional climates, wastewater infrastructure, source water quality, and discharge regulation. Although modifications to plant systems may incur high capital costs, the payback period can be as little as several months. Semiconductor manufacturers can reap even greater savings by incorporating reclamation planning in the design of new facilities. Includes 19 references, figure.