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About This Item
Full Description
ISO 15632 defines the most important quantities that characterize an energy dispersive X-ray spectrometer (EDS) consisting of a semiconductor detector, a pre-amplifier and a signal processing unit as the essential parts. This International Standard is only applicable to spectrometers with semiconductor detectors operating on the principle of solid state ionization. It specifies minimum requirements for such spectrometers attached to an electron probe microanalyser (EPMA) or a scanning electron microscope (SEM). Realization of the analysis is outside the scope of this International Standard.
Document History
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ISO 15632:2021
Microbeam analysis - Selected instrumental performance parameters for the specification and checking of energy-dispersive X-ray spectrometers (EDS) for use with a scanning electron microscope (SEM) or an electron probe microanalyser (EPMA)- Most Recent
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ISO 15632:2012
Microbeam analysis - Selected instrumental performance parameters for the specification and checking of energy-dispersive X-ray spectrometers for use in electron probe microanalysis- Historical Version
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ISO 15632:2002
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Microbeam analysis - Instrumental specification for energy dispersive X-ray spectrometers with semiconductor detectors- Historical Version