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About This Item
Full Description
For monitoring purposes, only populations of particles with a lower size limit of 0.1 microns (100 nm) or less "nanoscale" are considered.
The monitoring given in this document is for use mainly in "operational" states.
NOTE 1 For the purposes of this document, reference is made to "nanoscale particles", which means all nano-objects having one (nanoplate), two (nanofibre) or three (nanoparticle) dimensions in the nanoscale.
NOTE 2 As a consequence, the specifications for monitoring air cleanliness by nanoscale particle concentration of the cleanroom in operational state also considers process specifics, e.g., used equipment, personnel behaviour, etc.
NOTE 3 Health and safety considerations are excluded from this document.
Document History
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ANSI/IEST/ISO 14644-12
viewing
Cleanrooms and associated controlled environments - Part 12: Specifications for monitoring air cleanliness by nanoscale particle concentration- Most Recent
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ISO/FDIS 14644-12
Cleanrooms and associated controlled environments -- Part 12: Specifications for monitoring air cleanliness by nanoscale particle concentration (Final Draft)- Historical Version
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ISO/DIS 14644-12
Specifications for monitoring air cleanliness by nanoscale particle concentration- Historical Version