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Chemically accelerated vibratory finishing eliminates wear and contact fatigue, resulting in gears surviving higher power densities for a longer life compared to traditional finishes. Studies have confirmed this process is metallurgically safe for both through hardened and case carburized alloy steels. The superfinish can achieve an Ra < 1.5 uinch, while maintaining tolerance levels. Metrology, topography, scanning election microscopy, hydrogen embrittlement, contact fatigue and lubrication results are presented.