1.1 The purpose of this guide is to provide the secondary ion mass spectrometry (SIMS) analyst with two procedures for determining relative sensitivity factors (RSFs) from ion implanted external standards. This guide may be used for obtaining the RSFs of trace elements (less than 1 atomic %) in homogeneous (chemically and structurally) specimens. This guide is useful for all SIMS instruments.

1.2 This guide does not describe procedures for obtaining RSFs for major elements (greater than 1 atomic %). In addition, this guide does not describe procedures for obtaining RSFs from implants in heterogeneous (either laterally or in-depth) specimens.

1.3 The values stated in SI units are to be regarded as the standard.

1.4 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.