There are several methods of generating OH free radicals from ozone and/or hydrogen peroxide and ultraviolet light. They all have in common that the OH free radicals originate in one single source only whereas in the combination of ozone with ionizing radiation two simultaneous working sources for the OH free radicals exist. The resulting higher OH free radical concentration makes this process especially apt for the remediation of low level contaminated groundwater as for example trichloroethylene (TCE) contamination in the sub-ppm range. A cost comparison between O3/UV and O3/electron beam for remediation of a groundwater contaminated with 100 ppb TCE indicated that for a throughput of about 5 million gallons/day the O3/electron beam process is more cost-effective.