Std

BS 05/30142385 DC

ISO 14644-6. Cleanrooms and associated controlled environments. Part 6. Vocabulary

standard by BSI Group , 11/22/2005

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Cross References: ISO 14644-1:1999*ISO 14644-2:2000*ISO 14644-3*ISO 14644-4:2001*ISO 14644-5:2004*ISO 14644-7:2004*ISO 14644-8*ISO 14698-1:2003*ISO 14698-2:2003*
 

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Published:
11/22/2005
Number of Pages:
29
 

Document History

  1. BS EN ISO 14644-6:2007


    Cleanrooms and associated controlled environments-Vocabulary

    • Most Recent

  2. BS 05/30142385 DC

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    ISO 14644-6. Cleanrooms and associated controlled environments. Part 6. Vocabulary

    • Historical Version

  3. BS 5295-0:1989


    Environmental cleanliness in enclosed spaces-General introduction, terms and definitions for clean rooms and clean air devices

    • Historical Version

  4. BS 5295-1:1976


    Environmental cleanliness in enclosed spaces-Specification for controlled environment clean rooms, work stations and clean air devices

    • Historical Version