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BS IEC 62047-30:2017

Semiconductor devices. Micro-electromechanical devices-Measurement methods of electro-mechanical conversion characteristics of MEMS piezoelectric thin film

standard by British Standard / International Electrotechnical Commission , 10/09/2017

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Full Description

BS IEC 62047-30:2017 specifies measuring methods of electro-mechanical conversion characteristics of piezoelectric thin film used for micro sensors and micro actuators, and its reporting schema to determine the characteristic parameters for consumer, industry or any other applications of piezoelectric devices. This document applies to piezoelectric thin films fabricated by MEMS process.


Cross References:
IEC 60483:1976
EN 50324-2:2002


All current amendments available at time of purchase are included with the purchase of this document.
 

Product Details

Published:
10/09/2017
ISBN(s):
9780580935787
Number of Pages:
22
File Size:
1 file , 1 MB
Product Code(s):
30338637, 30338637, 30338637