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BS ISO 13083:2015

Surface chemical analysis. Scanning probe microscopy. Standards on the definition and calibration of spatial resolution of electrical scanning probe microscopes (ESPMs) such as SSRM and SCM for 2D-dopant imaging and other purposes

standard by British Standard / International Organization for Standardization , 08/31/2015

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Full Description

BS ISO 13083:2015 describes a method for measuring the spatial (lateral) resolution of scanning capacitance microscopes (SCMs) or scanning spreading resistance microscopes (SSRMs), which are widely used in imaging the distribution of carriers and other electrical properties in semiconductor devices. The method involves the use of a sharp-edged artefact.


Cross References:
ISO 18115-2
ISO 18516


All current amendments available at time of purchase are included with the purchase of this document.
 

Product Details

Published:
08/31/2015
ISBN(s):
9780580677519
Number of Pages:
26
File Size:
1 file , 2.3 MB
Same As:
ISO 13083:2015
Product Code(s):
30203228, 30203228, 30203228
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This product is unavailable in Russia, Ukraine, Belarus
 

Document History

  1. BS ISO 13083:2015

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    Surface chemical analysis. Scanning probe microscopy. Standards on the definition and calibration of spatial resolution of electrical scanning probe microscopes (ESPMs) such as SSRM and SCM for 2D-dopant imaging and other purposes

    • Most Recent

  2. BS 13/30203227 DC


    BS ISO 13083. Surface chemical analysis. Scanning Probe Microscopy. Standards on the definition and calibration of spatial resolution of Scanning Spreading Resistance Microscopy and Scanning Capacitance Microscopy

    • Historical Version