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DANSK DS/EN ISO 23131 [ Active ]

Ellipsometry – Principles (ISO 23131:2021)

standard by Dansk Standard , 11/15/2022

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Full Description

SAME AS ISO 23131

This document specifies a method for determining optical and dielectric constants in the UV-VIS-NIR spectral range as well as layer thicknesses in the field of at-line production control, quality assurance and material development through accredited test laboratories. It is applicable to stand-alone measuring systems. The presentation of the uncertainty of results conforms to ISO/IEC Guide 98-3.

 

Product Details

Edition:
22#
Published:
11/15/2022
Number of Pages:
28
File Size:
1 file , 1.5 MB
Product Code(s):
DS-026, DS-026
 

Document History

  1. DANSK DSF/PREN ISO 23131


    Ellipsometry – Principles (ISO 23131:2021)

    • Historical Version

  2. DANSK DS/EN ISO 23131

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    Ellipsometry – Principles (ISO 23131:2021)

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