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Full Description

IEC 62047-1:2016 defines terms for micro-electromechanical devices including the process of production of such devices. This edition includes the following significant technical changes with respect to the previous edition:
a) removal of ten terms;
b) revision of twelve terms;
c) addition of sixteen new terms.
 

Document History

  1. IEC 62047-1 Ed. 2.0 b:2016

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    Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions

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  2. IEC 62047-1 Ed. 1.0 b:2005


    Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions

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