1878353

ISO 11952:2014

Surface chemical analysis - Scanning-probe microscopy - Determination of geometric quantities using SPM: Calibration of measuring systems

standard by International Organization for Standardization , 05/15/2014

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Full Description

ISO 11952:2014 specifies methods for characterizing and calibrating the scan axes of scanning-probe microscopes for measuring geometric quantities at the highest level. It is applicable to those providing further calibrations and is not intended for general industry use, where a lower level of calibration might be required.

 

Product Details

Published:
05/15/2014
Number of Pages:
66
File Size:
1 file , 2.8 MB
Note:
This product is unavailable in Ukraine, Russia, Belarus
 

Document History

  1. ISO 11952:2019


    Surface chemical analysis - Scanning-probe microscopy - Determination of geometric quantities using SPM: Calibration of measuring systems

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  2. ISO 11952:2014

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    Surface chemical analysis - Scanning-probe microscopy - Determination of geometric quantities using SPM: Calibration of measuring systems

    • Historical Version