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ISO 20146:2019

Vacuum technology - Vacuum gauges - Specifications, calibration and measurement uncertainties for capacitance diaphragm gauges

standard by International Organization for Standardization , 02/01/2019

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Full Description

This document defines terms related to capacitance diaphragm gauges (CDGs), specifies which parameters have to be given for CDGs, details their calibration procedure and describes which measurement uncertainties have to be considered when operating these gauges.

This document complements ISO 3567 and ISO 27893 when calibrating CDGs and using them as reference standards.

 

Product Details

Edition:
1st
Published:
02/01/2019
Number of Pages:
24
File Size:
1 file , 1.4 MB
Same As:
BS ISO 20146:2019
Note:
This product is unavailable in Ukraine, Russia, Belarus