2215039 Preview

ISO/TR 15969:2021

Surface chemical analysis - Depth profiling - Measurement of sputtered depth

standard by International Organization for Standardization (Technical Report) , 03/01/2021

View all product details

Most Recent

Track It

Language:
    • Available Formats
    • Options
    • Availability
    • Priced From ( in USD )
    • Printed Edition
    • Ships in 1-2 business days
    • $124.00
    • Add to Cart

Customers Who Bought This Also Bought

 

About This Item

 

Full Description

ISO/TR 15969:2021 provides guidelines for measuring the sputtered depth in sputtered depth profiling. The methods of sputtered depth measurement described in this document are applicable to techniques of surface chemical analysis when used in combination with ion bombardment for the removal of a part of a solid sample to a typical sputtered depth of up to several micrometres. The depth typically determined by this approach is between 1 nm to 500 µm.
 

Product Details

Edition:
2nd
Published:
03/01/2021
Number of Pages:
20
File Size:
1 file , 1.7 MB
Note:
This product is unavailable in Ukraine, Russia, Belarus
 

Document History

  1. ISO/TR 15969:2021

    👀 currently
    viewing


    Surface chemical analysis - Depth profiling - Measurement of sputtered depth

    • Most Recent

  2. ISO/TR 15969:2001


    Surface chemical analysis - Depth profiling - Measurement of sputtered depth

    • Historical Version