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ISO/TS 20175:2018

Vacuum technology - Vacuum gauges - Characterization of quadrupole mass spectrometers for partial pressure measurement

standard by International Organization for Standardization (Technical Standard) , 04/01/2018

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ISO/TS 20175:2018 describes procedures to characterize quadrupole mass spectrometers (QMSs) with an ion source of electron impact ionization and which are designed for the measurement of atomic massto- charge ratios m/z < 300.

This document is not applicable to QMSs with other ion sources, such as chemical ionization, photoionization or field ionization sources and for the measurements of higher m/z, which are mainly used to specify organic materials.
 

Product Details

Edition:
1st
Published:
04/01/2018
Number of Pages:
30
File Size:
1 file , 530 KB
Same As:
BS PD ISO/TS 20175:2018
Note:
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