1762634

JEDEC JESD 35-2

ADDENDUM No. 2 to JESD35 - TEST CRITERIA FOR THE WAFER-LEVEL TESTING OF THIN DIELECTRICS

standard by JEDEC Solid State Technology Association , 02/01/1996

View all product details

Most Recent

Track It

Language:
    • Available Formats
    • Options
    • Availability
    • Priced From ( in USD )
    • Printed Edition
    • Ships in 1-2 business days
    • $54.00
    • Add to Cart
    • Printed Edition + PDF
    • Immediate download
    • $73.00
    • Add to Cart

Customers Who Bought This Also Bought

 

About This Item

 

Full Description

This addendum includes test criteria to supplement JESD35. JESD35 describes procedures developed for estimating the overall integrity of thin oxides in the MOS Integrated Circuit manufacturing industry. Two test procedures are included in JESD35: a Voltage-Ramp (V-Ramp) and a Current-Ramp (J-Ramp). As JESD35 became implemented into production facilities on a variety of test structures and oxide attributes, a need arose to clarify end point determination and point out some of the obstacles that could be overcome by careful characterization of the equipment and test structures.
 

Product Details

Published:
02/01/1996
Number of Pages:
13
File Size:
1 file , 280 KB
Note:
This product is unavailable in Russia, Ukraine, Belarus