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About This Item
Document History
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DIN 50451-3
Testing of materials for semiconductor technology - Determination of traces of elements in liquids - Part 3: Determination of 31 elements in high-purity nitric acid by ICP-MS- Most Recent
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DIN 50451-3 - DRAFT
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Draft Document - Testing of materials for semiconductor technology - Determination of traces of elements in liquids - Part 3: Aluminium (Al), Arsenic (As), Barium (Ba), Beryllium (Be), Bismuth (Bi), Calcium (Ca), Cadmium (Cd), Cobalt (Co), Chromium (Cr), Copper (Cu), Iron (Fe), Gallium (Ga), Germanium (Ge), Hafnium (Hf), Indium (In), Potassium (K), Lithium (Li), Magnesium (Mg), Manganese (Mn), Molybdenum (Mo), Nickel (Ni), Niobium (Nb), Lead (Pb), Antimony (Sb), Tin (Sn), Strontium (Sr), Tantalum (Ta), T...- Historical Version
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DIN 50451-3
Determination of traces of elements in liquids for use in semiconductor technology - Part 3: Determination of aluminium, cobalt, copper, nickel, sodium and zinc in nitric acid by inductively-coupled plasma mass spectrometry (ICP-MS)- Historical Version