ISO/TS 20175:2018
Vacuum technology - Vacuum gauges - Characterization of quadrupole mass spectrometers for partial pressure measurement
standard by International Organization for Standardization (Technical Standard) , 04/01/2018
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Full Description
ISO/TS 20175:2018 describes procedures to characterize quadrupole mass spectrometers (QMSs) with an
ion source of electron impact ionization and which are designed for the measurement of atomic massto-
charge ratios m/z < 300.
This document is not applicable to QMSs with other ion sources, such as chemical ionization, photoionization or field ionization sources and for the measurements of higher m/z, which are mainly used to specify organic materials.
This document is not applicable to QMSs with other ion sources, such as chemical ionization, photoionization or field ionization sources and for the measurements of higher m/z, which are mainly used to specify organic materials.
