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About This Item
Full Description
The appropriateness of cleaning techniques will make reference to the cleanliness classes and associated test methods found in ISO 14644 9 and ISO 14644 10.
The following matters of general guidance will be provided:
- expected surface cleanliness levels;
- suitability of cleaning methods;
- compatibility of surfaces with the cleaning technique;
- assessment of cleaning appropriateness.
The following will be excluded from this document:
- classification of cleaning methods;
- product produced within a cleanroom;
- specific surface-related cleaning methods;
- detailed description of cleaning mechanisms, methods and procedures of various cleaning methods;
- detailed material characteristics;
- description of damage mechanisms by cleaning processes and time-dependent effects;
- references to interactive bonding forces between contaminants and surfaces or generation processes that are usually time-dependent and process-dependent;
- other characteristics of particles such as electrostatic charge, ionic charges, etc.;
- chemical reactions between molecular contaminants and surfaces;
- microbiological aspects of surface cleanliness;
- radioactive aspects of contamination;
- health and safety considerations;
- environmental aspects such as waste disposal, emissions, etc.;
- selection and use of statistical methods.
Document History
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ISO 14644-13:2017
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Cleanrooms and associated controlled environments - Part 13: Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical classifications- Most Recent
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ISO 14644-13:2017
Cleanrooms and associated controlled environments - Part 13: Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical classifications- Historical Version
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ISO/FDIS 14644-13
Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical classifications- Historical Version
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ISO/DIS 14644-13
Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical classifications- Historical Version