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About This Item
Full Description
Cross References:
ISO 14644-6
ISO 14644-4:2001
ISO 14644-5:2004
ISO 14644-7:2004
ISO 14698
SEMI F21-1102
IEST-G-CC035.1
ASTM D5127-99
JACA No. 34-:2000
JACA No. 35A-2003
JACA No. 43-2006
SEMI E108-0307
IEST-RP-CC031.2
IDEMA Standard M11-99
JIS B9917-8:2010
SEMI E45-1101
SEMI E460307
All current amendments available at time of purchase are included with the purchase of this document.
Document History
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BS EN ISO 14644-8:2022
Cleanrooms and associated controlled environments-Assessment of air cleanliness by chemical concentration (ACC)- Most Recent
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BS EN ISO 14644-8:2013
viewing
Cleanrooms and associated controlled environments-Classification of air cleanliness by chemical concentration (ACC)- Historical Version
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BS 11/30248115 DC
BS EN ISO 14644-8. Cleanrooms and associated controlled environments. Part 8. Classification of air cleanliness by chemical concentration- Historical Version
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BS EN ISO 14644-8:2006
Cleanrooms and associated controlled environments-Classification of airborne molecular contamination- Historical Version