BS PD CEN ISO/TS 80004-8:2020
Nanotechnologies. Vocabulary-Nanomanufacturing processes
standard by BSI Group , 12/08/2020
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About This Item
Full Description
This document defines terms related to nanomanufacturing processes in the field of nanotechnologies.
All the process terms in this document are relevant to nanomanufacturing, however, many of the listed
processes are not exclusively relevant to the nanoscale. Terms that are not exclusive are noted within
the definitions. Depending on controllable conditions, such processes can result in material features at
the nanoscale or, alternatively, at larger scales.
There are many other terms that name tools, components, materials, systems control methods or
metrology methods associated with nanomanufacturing that are beyond the scope of this document.
All current amendments available at time of purchase are included with the purchase of this document.
All current amendments available at time of purchase are included with the purchase of this document.
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