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BS 12/30235353 DC

BS ISO 16413. Evaluation of thickness, density and interface width of thin films by X-ray reflectometry. Instrumental requirements, alignment and positioning, data collection, data analysis and reporting

standard by BSI Group , 01/30/2012

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Published:
01/30/2012
Number of Pages:
34
 

Document History

  1. BS ISO 16413:2020


    Evaluation of thickness, density and interface width of thin films by X-ray reflectometry. Instrumental requirements, alignment and positioning, data collection, data analysis and reporting

    • Most Recent

  2. BS ISO 16413:2013


    Evaluation of thickness, density and interface width of thin films by X-ray reflectometry. Instrumental requirements, alignment and positioning, data collection, data analysis and reporting

    • Historical Version

  3. BS 12/30235353 DC

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    BS ISO 16413. Evaluation of thickness, density and interface width of thin films by X-ray reflectometry. Instrumental requirements, alignment and positioning, data collection, data analysis and reporting

    • Historical Version