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About This Item

 

Full Description

BS ISO 16700:2016 specifies a method for calibrating the magnification of images generated by a scanning electron microscope (SEM) using an appropriate reference material. This method is limited to magnifications determined by the available size range of structures in the calibrating reference material. This International Standard does not apply to the dedicated critical dimension measurement SEM.


Cross References:
ISO/IEC 17025:2005
ISO Guide 30
ISO Guide 34
ISO Guide 35
ISO 5725-1
ISO/IEC Guide 98-3
GUM:1995


All current amendments available at time of purchase are included with the purchase of this document.
 

Document History

  1. BS ISO 16700:2016

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    Microbeam analysis. Scanning electron microscopy. Guidelines for calibrating image magnification

    • Most Recent
  2. BS ISO 16700:2004


    Microbeam analysis. Scanning electron microscopy. Guidelines for calibrating image magnification

    • Historical Version